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Figure 2
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Raman spectra extracted from different parts (substrate, pad and Fin) on (A) Si/Si0.7Ge0.3 Fin, (B) bulk Si Fin, and (C) Si/Si0.7Ge0.3 pads only. The line-scan was performed along the Fin direction. The full width at half maxima (FWHM) of Si–Si Raman peaks in Si along different parts were extracted and shown in (D).
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