Open Access
Table 1
An experimental list of recent high-Q nonlocal resonance metasurfaces
| Unit structure | Resonance type | Material | λ (nm) | Exp. Q | Ref. |
| Circular hole | GMR | Resist on SOI | 1551 | 239,000 | [15] |
| Square hole | GMR | Resist on SiN | 779 | 1,100,000 | [16] |
| Cuboid | Accidental-BIC | SOI | 1538 | 5305 | [20] |
| T-shape block | SP-BIC | Si on quartz | 1588 | 18,511 | [21] |
| U-shape block | SP-BIC | Si on sapphire | 1548 | 3534 | [22] |
| Shallow pair-rod | SP-BIC | SOI | 1560 | 101,000 | [23] |
| Double holes | SP-BIC | SOI | 1553 | 36,964 | [24] |
| IRU a | SP-BIC | Si on SiO2 | 1550 | 10,000 | [17] |
| Nanodisk with eccentric hole | SP-BIC | Si3N4 on SiO2 | 569.9 | 3700 | [18] |
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