Issue |
Natl Sci Open
Volume 4, Number 2, 2025
|
|
---|---|---|
Article Number | 20240043 | |
Number of page(s) | 14 | |
Section | Materials Science | |
DOI | https://doi.org/10.1360/nso/20240043 | |
Published online | 09 January 2025 |
RESEARCH ARTICLE
Batch growth of wafer-scale nanocrystalline NbSe2 film for surface-enhanced Raman spectroscopy
1
Institute of Sustainability for Chemicals, Energy and Environment (ISCE2), Agency for Science, Technology and Research (A*STAR), Singapore 627833, Singapore
2
National Laboratory of Solid State Microstructures, School of Physics, Nanjing University, Nanjing 210093, China
3
State Key Laboratory of Nuclear Physics and Technology, Center for Applied Physics and Technology, Peking University, Beijing 100871, China
4
Key Laboratory of Bio-inspired Smart Interfacial Science and Technology of Ministry of Education, School of Chemistry, Beihang University, Beijing 100191, China
5
State Key Laboratory of Flexible Electronics (LoFE), Jiangsu Key Laboratory for Biosensors, Institute of Advanced Materials (IAM), Jiangsu National Synergetic Innovation Center for Advanced Materials (SICAM), School of Materials Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China
6
Guangdong Provincial Key Laboratory of Nano-Micro Materials Research, School of Advanced Materials, Peking University Shenzhen Graduate School, Peking University, Shenzhen 518055, China
* Corresponding authors (emails: linhh@isce2.a-star.edu.sg (Huihui Lin); iamlywu@njupt.edu.cn (Luyan Wu); chenzhaolong@pku.edu.cn (Zhaolong Chen); chmlij@buaa.edu.cn (Jing Li))
Received:
19
August
2024
Revised:
16
December
2024
Accepted:
31
December
2024
Noble metal-based surface-enhanced Raman spectroscopy (SERS) has emerged as an ultrasensitive technique capable of detecting single molecules through their unique vibrational signatures. However, achieving robust SERS nanomaterials that combine significant enhancement factors, scalable reproducibility, and superior chemical stability remains a significant challenge. We present an oxygen-free vapor deposition technique for wafer-scale fabrication of nanocrystalline NbSe2 (NC-NbSe2) films on SiO2/Si substrates, which is compatible with batch production. The NC-NbSe2 films exhibit remarkable chemical stability across both crystalline domains (average size ~8.1 nm) and grain boundaries. This stability, combined with enhanced surface adsorption and a high density of states near the Fermi level, enables superior SERS performance. Rhodamine 6G detection demonstrates a sensitivity of 1×10−10 M, comparable to noble metal-based SERS substrates. Additionally, the NC-NbSe2 film maintains stable SERS signals under harsh thermal and chemical conditions. This scalable approach enables the creation of uniform, reproducible SERS atomic thin film, advancing applications in microelectronics and sensing technologies.
Key words: NbSe2 / metallic transition-metal dichalcogenides / surface-enhanced Raman scattering (SERS) / wafer-scale growth / molecular sensing
© The Author(s) 2025. Published by Science Press and EDP Sciences.
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