REVIEW

The state-of-the-art fundamentals and applications of micro-energy systems on-chip

¹ Ministry of Education Key Laboratory of Micro/Nano Systems for Aerospace, Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, School of Mechanical Engineering, Northwestern Polytechnical University, Xi’an 710072, China
² Qinghai Huanghe Hydropower Development Co., Ltd., Xi'an Solar Power Branch, Xi'an 710100, China
³ Centre for Nanofibers and Nanotechnology, Department of Mechanical Engineering, National University of Singapore, Singapore 117576, Singapore

^* Corresponding author (email: yetao@nwpu.edu.cn)

Received: 24 August 2024
Revised: 21 September 2024
Accepted: 29 October 2024

Abstract

In the past decade, micro-energy systems on-chip (MESOC) have been widely studied from energy collection to storage, management, and system integration, their applications have been explored in fields such as low-power and self-powered microelectronic devices (sensors, actuators, modulators, etc.). These applications fundamentally require an efficient, stable, and highly integrated power platform to meet specific energy demands. Traditional energy solutions rely heavily on external power supplies or periodic replacement of energy storage batteries. Although these approaches can provide stable power outputs, the large size and low energy density make it difficult to adapt to the miniaturization of electronic devices. Breakthroughs in the field of MESOC can significantly improve the portability and independence of advanced microelectronic devices by harvesting abundant environmental energy resources. In this work, we discuss new opportunities for MESOC, including newly investigated microscale energy harvesting devices, advanced energy storage devices, high-efficiency management modules, and system integration. Finally, future applications and prospects are discussed, aiming to promote a wider range of lightweight and efficient MESOC.