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Figure 1

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The batch growth of wafer-scale NC-NbSe2 films. (A) Schematic illustration of the two-step vapor deposition growth that involves a magnetron sputtering of Nb film and a subsequential selenylation into NC-NbSe2 film in a continuous preparation route. (B, C) Photographs and (D) optical microscopic image of as-grown NC-NbSe2 film on 4-inch SiO2/Si substrates. Notably, the SiO2 substrate was artificially exposed for visual guidance. (E) The representative Raman spectra of NC-NbSe2 film. The inset shows the characteristic Raman stretching modes of A1g and E2g1 of NbSe2. (F) AFM image and the corresponding height profile of NC-NbSe2 films directly grown on SiO2/Si. (G) Atomic structure model and (H) the ADF-STEM image of bilayer NC-NbSe2 film.

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